Used Leybold Turbovac Tmp1000 for sale (105)

Condition: used, UHV deposition system (ebeam sputter) UHV deposition system: Was used for deposition Titanium - Gold (ebeam) Ebeam deposition unit is removed Cryopump and prepump is removed Loadlock: for samples round 75mm Incl. sample heater 450l/s turbomolecular pump (Leybold) Proceschamber: Size: Width 680mm x Height 750mm x Depth 590mm Incl. shielding Double oring door (partially pumped) Heaters Basepressure low 10-7mbar, high 10-8mbar Electronics: Baseline cabinet (e-beam unit removed) Old PLC (for pump/vent) Gas cabinet/water: Various valves/flow reducers for gas and water Note: D&M Vacuumsystems can upgrade the system to new processes (E-beam or Sputter) incl. new electronics and software. Tedpouhcn Nefx Am Tja EUR 55.000,-

Condition: used, Controller TMP process chamber Controller TMP for wafer handler/10pos. cassette front loader 5KW DC power supply (AE) Tsdpfx Ameuhcpyj Tja 5kW RF power supply (Huettinger) Process pump Leybold D65 + 250/500 roots blower Vacuum handler for cassette system 1x 1000ls turbopump Leybold 1x LN2 / meissner stage

Year of construction: 2007, condition: used, Pulsed plasma nitriding system, manufacturer PLATEG Plasma Technik Grün, type PulsPlasma PP 800, 2000 x 2900, mono with tandem preparation, system no. A 5811, with 1 plasma generator, type PP 800/160, no. AN 7491, year of manufacture 2006/2007, 600 V output voltage, 800 A pulse current, 480 kVA pulsed power, 190 kW connected load, process control type Stange 510, stainless steel vacuum chamber Ø 2000 mm (usable volume 1800 mm), height 2900 mm (usable height 2200 mm), wall thickness 10 mm, batch weight 7,500 kg, process temperature max. 600°C, vacuum pump by Leybold, 13 kW, 2,000 m³/h, DN 160, with pressure sensor and manometer, gas supply, cooling water supply with internal recirculator, overall dimensions: 7,840 mm x 3,470 mm x approx. 7,400 mm height, with control cabinet including 2 cooling units. Tedpfx Aeyazhzjm Tja

Condition: used, Year of construction: 2011, functionality: unexamined, total length: 1,700 mm, total height: 1,400 mm, total width: 680 mm, overall weight: 400 kg, Centrotherm VLO 20-N2-HCOOH Vacuum Furnace/Process System Tsdjyubphspfx Am Tsa Thermal process system with nitrogen and formic acid supply, including Leybold vacuum pump and control system. Year of manufacture: 2011. Well-maintained exterior condition, but without documentation and no available password – therefore only partially tested. Power: 10 kW; Load current: 25 A; Supply: 3/N~ 400/230 V 50 Hz; Breaking capacity: 0.3 kA; Operating hours: approx. 21,286 h

Year of construction: 2025, operating hours: 50 h, condition: as good as new (ex-display), Spray-flood cleaning system – parts cleaning system for the highest requirements or precision and fine cleaning. Basket useful dimensions, loading basket: L x W x H 600 x 400 x 300 mm Maximum loading weight: 150 kg; loading trolley in front of the system included. 3-tank design: Cleaning (600 liters) Rinse 1 (600 liters) Rinse 2 (600 liters) System electrically heated - Cleaning processes: Spraying, injection flooding, ultrasonic - Ultrasonic (rod transducer): 3,000 watts effective / 6,000 watts peak - 30 kHz - Basket remains stationary, oscillates, or rotates during the cleaning, rinsing, and drying process (freely selectable in the program) - Hot air and vacuum drying (vacuum pump, manufacturer Leybold, 300 m3/h) - Full filtration of all tanks (3), each with a Topline bag filter (manufacturer Eaton), filter fineness freely selectable - Automatic water replenishment per tank - Preparation for coalescing oil separator - Preparation for the installation of a closed-loop system for the treatment of rinse water Tedjg Itg Ejpfx Am Tja Control: Siemens S7-1200 with 16 programs Year of manufacture: 12/2025