Wafer Front-End Module 300mmBROOKS ASYST
Spartan EFEM Sorter
Machine data
- Machine type:
- Wafer Front-End Module 300mm
- Manufacturer:
- BROOKS ASYST
- Model:
- Spartan EFEM Sorter
- Year of construction:
- 2010
- Condition:
- used
Price & Location
- Location:
- Heilbronner Str. 22, 01189 Dresden, Deutschland
Details about the offer
- Listing ID:
- A20798077
- Reference number:
- LW43278
- Update:
- 19.12.2025
Description
Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used
Technical Data:
100-240V AC
50/60Hz
10A
General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot
This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, and all necessary interfaces for seamless integration into production lines.
Iiedpfx Aox I Ax Sjh Ujk
In addition, it comes with a fully integrated wafer transfer robot that extracts wafers from FOUP/carrier load ports, separates them, and precisely delivers them to downstream process modules.
Year of manufacture: 27.12.2010
Including CD with operating, service, and installation manuals (9701-3060-01 Rev G)
The listing was translated automatically. Translation errors are possible.
Seller
Registered since: 2014
Telephone & Fax
Machineseeker Trust Seal
What is the trust seal?
Machineseeker certifies selected sellers with the Machineseeker trust seal. Before approval, a standardized and comprehensive check is carried out by experienced Machineseeker staff.
What do we verify?
Check of
trade licence or commercial register extract
Verification of the dealer's
postal address
Validation of the
banking details
Verification of
accessibility to
main phone number
Credit report
may not contain negative criteria
Buyer complaints
can lead to withdrawal of the sealWhat does this mean for you as buyer?
The Machineseeker trust seal enables you, as a buyer, to identify trustworthy sellers who are very likely to do honest and righteous business, without having to do your own investigation.
Disagreements may of course still arise during the purchasing process. Machineseeker is not liable for any legal violations by buyers or sellers active on Machineseeker.