Used Biesse Rover 16 for sale (330)

Condition: ready for operation (used), Technical characteristics Machining X 3180, Y 1340 Drilling capacity X 3405, Y 1260 Pneumatic locking HSK63 12 KW 3-axis electro-chuck Displacement 0-100 m / min Hodpfxstqka To Addofb 0-90 ° blade grooving group 14-pin vertical drilling unit, 6-pin horizontal, 15-inch screen control cabinet included SOFT and control Machine to be restarted Nombre de ventouses12 Nombre de poutres6 Caractéristiques usinageVacuum pump Capacité pompe à vide100 m3/h Power and Motors Overall dimensions

Condition: excellent (used), Year of construction: 2001, functionality: fully functional, Used Biesse Rover 35L CNC machining centre for woodworking, year 2001, in very good condition as shown in the photos. Machining range X 4500 mm, Y 1650 mm, Z 180 mm. Equipped with 10 HP air-cooled electrospindle, 21-position chain tool magazine, drilling head, pod & rail vacuum table and Becker VTLF 2.250 vacuum pump (2011). Machine details Brand / model: Biesse Rover 35L Year of construction: 2001 Type: CNC machining centre for routing, drilling and milling of panels and solid wood Condition: very good, complete, as in the photos Working range: Hodpfex A Ap Rex Addefb X = 4,500 mm Y = 1,650 mm Z = 180 mm Composition / equipment 10 HP electrospindle, air cooling, ISO30 Chain tool magazine with 21 positions Pod & rail vacuum table with several vacuum pods ATS predisposition for vertical or horizontal pneumatic clamping (doors, frames, edges etc.) Drilling head (multi-spindle boring unit) Dust extraction hoods on the machining head Vacuum system Vacuum pump: Becker VTLF 2.250 Year: 2011 Capacity: approx. 250 m³/h Power: 5.5 / 6.4 kW Max. vacuum: 200 mbar Technical data Approx. dimensions on site (L × W × H): 7,580 × 4,570 × 2,800 mm Approx. weight: 3,000 kg Other information Used machine in very good condition, ready for dismantling and loading More photos and video available on request Location: Lithuania, at our factory (ex-works) Availability: by agreement Price: on request

Condition: used, Year of construction: 1992, Used machine Year of manufacture: 1992 Working area: X-axis: 2310 mm, Y-axis: 628 mm, Z-axis: 90 mm Max. programmable speed: X-axis: 100 m/min; Y-axis: 75 m/min; Z-axis: 15 m/min Drill holder: diameter 10 mm Spindle speed: 4000 rpm Grooving saw: diameter 120 mm Drill spindles: 4 horizontal spindles on the X-axis, 12 vertical spindles in the X-line Operating air pressure: 6 bar Maximum compressed air consumption: 0.75 NL/cycle Installed power: max. 7.5 kW Vacuum tool capacity: 40 m³/h CNC: Display: monochrome 9" Floppy disk drive PLC for machine cycle control Hfjdpfx Aswwnf Neddob Availability: short-term Stock location: Röllbach

Condition: used, Year of construction: 1999, functionality: fully functional, travel distance X-axis: 2,900 mm, travel distance Y-axis: 1,300 mm, travel distance Z-axis: 140 mm, feed rate X-axis: 75 m/min, feed rate Y-axis: 75 m/min, feed rate Z-axis: 15 m/min, controller manufacturer: XNC, spindle speed (min.): 1,000 rpm, spindle speed (max.): 24,000 rpm, spindle motor power: 11,000 W, number of spindles: 1, number of slots in tool magazine: 7, Equipment: CE marking, chip conveyor, documentation/manual, rotational speed infinitely variable, Biesse Rover 23 woodworking center – fully equipped Hfjdpfxsw S Edwo Addsb Still in use to this day, 1 to 2 days a week, but for sale due to business closure in Slovakia. Always well maintained. ✅ Powerful performance Milling spindle with ceramic bearings (11 kW) Adjustable speed: 1,000 – 24,000 rpm Drilling head with 10 vertical and 6 horizontal drills Circular saw on the X-axis ✅ Efficient & flexible Pneumatically adjustable vacuum pods in 6 rows, 3 per row 100 m³ vacuum pump Tool magazine with 7 positions (ISO 30) All adapters and tools included ✅ User-friendly Conveyor belt for automatic chip removal Immediately operational, fully equipped 📍 The machine is located in Slovakia and must be disassembled and collected by the buyer on site.

Condition: like new (used), Year of construction: 2019, operating hours: 900 h, functionality: fully functional, travel distance X-axis: 3,600 mm, travel distance Y-axis: 1,500 mm, Next to new nesting CNC machining center Hfjdpfx Adjxz Rfqjdeb 4-axis nesting CNC machining center. Purchased new in 10/2019. Has been used for less than 900 hours. The business for which the machine was acquired ceased due to the Corona pandemic, and usage has therefore been very minimal. The machine has been connected to an AL-KO extraction system, which is also for sale in a separate listing. Table size 3600x1500 mm. The machine can be used as a nesting table machine or, by removing the panel, vacuum pods can be used to raise the workpiece for machining. The machine is in full working order in all respects and is an excellent alternative to a new machine. Automatic 10-position tool changer, 2 x Busch rotary vane vacuum pumps (250 m³/h each). The work area can be divided into two separate zones. Drilling unit for vertical and horizontal drilling. Slot saw. Automatic tool height measurement (enables processing the same job with several tools without noticeable height differences). Supplied with bSolid software in Finnish. Suitable saw aggregate and planer aggregate also available for sale. The machining unit features collision sensors, so safety fencing is not required. The buyer is responsible for all costs related to relocation, including the preparation and transport of the machine (these services can be arranged, for example, through the machine's importer).

Condition: used, Year of construction: 2006, Numerical Control XP 600 Working range on X-axis mm 3060 Working range on Y axis mm 1140 Working range in Z axis mm 160 N ° 2 work fields Bar worktop No. 6 adjustable bars for suction cup support No. of pneumatic bakelite bars for panel lifting (?) No. 2 adjustable suction cups for each bar with vacuum seal for fixing the panel during processing No. 1 vertical electrospindle with C-axis 12 kW motor 10-position tool change system - positioned on the drilling head of the machine, ISO 30 type cones BH19L drilling head with 18 spindles arranged as follows: - No. 7 verticals on X axis - N° 6 verticals in Y axis - N° 4 horizontal on X axis - No. 2 horizontals on Y axis - No. 1 independent blade group for making grooves on the X axis Front protection and safety system with photocells Automatic lubrication system (?) Air conditioning system for cooling and cleaning of machine control Vacuum pump mc/h 250 TECHNICAL DETAILS TO BE CHECKED Hfsdpov Aacfjfx Addob

Condition: ready for operation (used), Technical characteristics CNC ROVER A machining center BIESSE's Rover A series machining centers are specially designed for daily milling and drilling operations on panels, doors, component doors and furniture. The mobile gantry structure is made of extra-thick electro-welded sheet steel and stiffening hangers to minimize distortion during machining. For movement of the moving column along the longitudinal axis (X axis) and in the transverse direction (Y axis), BIESSE has opted for a rack-and-pinion solution, enabling higher acceleration and speed parameters than those achievable with a ballscrew. Hjdpfx Aetqi U Ioddsfb Controlled axis motors : Brushless motors, controlled by digital actuators. Hardened steel controlled axis guides. Automatic centralized lubrication system. Machine equipped with two vacuum pumps, 250 m3/h and 300 m3/h. Activation of vacuum and pneumatic systems is available from any point along the machine's X work zone. Working range (vertical electrospindle axis): X= 5540 mm Y= 1560 mm for 4 axes, 1570 for 5 axes Z= 230 mm with modules H=74 mm /Configuration 1B and 3B Z = 275 mm with modules H=29 mm / Configuration 1B and 3B 8 ATS aluminum worktops 1 X-axis metric ruler for correct positioning of worktops 8 metric rulers on Y axis for correct positioning of workpiece clamping systems 32 carriages 132 x 132 x H 41.5 mm Each carriage rotates the modules every 15° 32 plugs for closing the carriages Additional quick-fit connections for special jigs EPS (Electronic Positioning System) automatic positioning for worktops up to 1550 mm, allowing automatic positioning of clamping devices at selected points. An entire half machining zone can be positioned in hidden time while the machine is machining (avoiding major productivity losses). Each carriage is equipped with a blowing system to ensure that the machining plane on which it slides is always clean. 2 X-shaped machining zones Reference systems : Rear line stop with 115 mm travel Intermediate line stop positioned at 685 mm Front line stop positioned at 1348 mm 4 side stops with 140 mm travel (2 left and 2 right) 2 additional side stops (1 left and 1 right) 1 retractable linear stop for raw panels. Vacuum module 132 x 146 Vacuum module 132 x 75 Vacuum module 132 × 54 CFT system : Vacuum system for aluminum CFT modules, for left work area Aluminum vacuum module, dimensions : X=1250 mm, Y=625 mm, H=74 mm, for modular worktops With this solution, it is possible to prepare a continuous surface for thin/flexible panels or for nesting, bending, etc Uniclamp vice Support base 130 x 130 mm Flat disc 130 x 130 mm Double-movement Uniclamp vice Circular support base, diameter 130 mm Clamping workpieces thicknesses from 40 to 98 mm Horizontal vice, height 74 mm Chip and waste conveyor belt Configuration (3B) : Machining unit 5 axis 13kW electrospindle, up to 20000 RPM HSK F63 spindle Liquid-cooled C axis sewing : 360° continuous rotation Maximum undercut angle: -5°. Drilling unit BH 17 L drilling head Up to 17 independent tools Single and multiple drilling Work on all 5 faces of the workpiece and grooves with X-direction blade on the upper face. 10 independent vertical spindles, 32 mm centres 5 in X direction 5 in Y direction 3 opposite independent horizontal spindles, 32 mm pitch 2 in X direction 1 in Y direction 1 circular blade ⌀ 120 mm For groove in X direction (useful cut 25 mm) Multifunctional unit 1 circular blade ⌀ 300 mm 2 independent Z axes (1 for the electro-spindle and 1 for the drilling and multi

Condition: used, machine/vehicle number: 008011, X axis working area: 6200 mm Y axis working area: 1935 mm Working Table: Pod and Rail Main Electrospindle power: 10.5 KW Number of controlled axes: 4 axes Total number of drilling spindles: 40 Total number of tool changer positions: 22 Hfodpfewu Af Ejx Addjb

Condition: new, Year of construction: 2022, axis stroke (X,Y,Z) 6735 x 1930 x 245 mm Hfodpfx Aoxf Dwzeddob Number of spindle head vertical 0 St. Number of spindles head horizontal 0 St. Number of tools 39 St. Dust suction hood 2x 250 mm Number of milling agregates 2 St. Year 2022 Speed 18.000 / 24.000 U/min. Required air-pressure 7 bar Motor output 16,5 / 19,2 kW Capacity 250 m³/h Control BH660

Condition: used, Year of construction: 2006, No. 3195 CNC machining center BIESSE Rover C 6.50 CONF.2 Used, year of construction 2006 Machine already disassembled According to our customer, the machine is fully functional Hodpfxevn R A Hs Addefb Various workpieces can be processed simultaneously on the machine Working area X 4850/4600 mm Working area Y 1535 mm Power output 228 kW, 39 A Required floor space approx. 8100 x 6500 mm LB Total weight approx. 6800 kg Sale on behalf of customer, ex location Poland, without dismantling, without transportation and assembly Errors in description and price excepted Dismantling, loading and transportation by us optionally possible To avoid possible misunderstandings, an on-site inspection by appointment is possible and recommended Sold as is Technical details, condition description, year of construction and scope of delivery according to manufacturer's brochure or previous owner, without guarantee Subject to prior sale For used machines, any warranty is excluded, the following applies: “purchased as seen” Pictures and videos serve as examples and do not represent the actual scope of delivery Terms of payment: Prices plus VAT, payment before collection or shipment Terms of delivery: ex location

Condition: good (used), Year of construction: 2002, Working range X 6,170 mm Working range Y 1,380 mm Working range Z 155 mm Main motor Kw7.5 kW Max rotation speed 24,000 rpm Aggregate heads Hjdpfxor E A U Is Addofb 4. axis C-axis tool change positions 10 vertex boring heads 20 Horizontal boring heads X 6 Horizontal boring heads Y 2 Arm structure Work surface Console table Number of bars 10 Positioning aid Vacuum pump capacity 2 x 125m³/h Chip conveyor belt

Condition: used, Year of construction: 2017, Numerical Control with B-Solid Software - 3D CAD-CAM program to design, simulate, and manage processes of machining of Biesse machining centers and drilling machines BNest Software - Software module dedicated to processing in Nesting mode that allows you to create projects containing the list of articles with the quantities to be produced and the list of plates to be used with the aim of minimize the material used and processing times Working field in X axis mm 4300 Working range in Y axis mm 2200 N ° 2 work fields Nesting work plan Automatic loading system with side lift table Hfsdpfx Adet Ul Dnedob Panel detachment system with 2 suction cups N° 1 vertical 3-axis electrospindle, Kw 13.2, with automatic tool change, Hsk cone type Automatic tool change system with 16 positions - positioned on the rear of the machine BH 10 boring head with 10 spindles arranged as follows: - N ° 5 vertical in X axis - N° 5 verticals in Y axis Automatic unloading system with motorized belt Worktop cleaning system Printing and application system of adhesive labels with labeling machine, 22" monitor, keyboard and mouse with dedicated PC Protection and safety system with perimeter grids Safety system with bumper Automatic lubrication system Air conditioning system for cooling and cleaning the machine control N° 2 vacuum pumps 250 m3/h Installed power Kw 31

Condition: ready for operation (used), Technical characteristics useful fields: 6000 x 1772.5 mm 1 4-axis spindle with HSK 63 tool charger, 12 positions 28 drilling spindles including 8 horizontal 10 mobile beams with 3 suction cups + vices Machine to be restarted Hfjdpfotqkbijx Addob Course d'axe Y1850 mm Course d'axe X6860 mm Course d'axe Z275 mm Nombre de ventouses3 Nombre de poutres10 Capacité pompe à vide100 m3/h Power and Motors Overall dimensions

Condition: used, machine/vehicle number: 007087, X axis working area: 4300 mm Y axis working area: 2200 mm Hfedpfeq U D D Hox Addob Working Table: Flat table Main Electrospindle power: 12 KW Number of controlled axes: 4 axes Total number of drilling spindles: 40 Total number of tool changer positions: 30

Condition: new, Year of construction: 2022, axis stroke (X,Y,Z) 3100 x 2205 x 170 mm Number of spindle head vertical 0 St. Number of spindles head horizontal 0 St. Number of tools 14 St. Dust suction hood 200 mm Number of milling agregates 1 St. Year 2022 Speed 24.000 U/min. Required air-pressure 7 bar Motor output 9 kW Hedpfoxfwdujx Addsfb Capacity 2x 250 m³/h Control BH660

Condition: ready for operation (used), Year of construction: 2013, functionality: fully functional, travel distance X-axis: 3,280 mm, travel distance Y-axis: 1,320 mm, travel distance Z-axis: 170 mm, number of slots in tool magazine: 12, Machine is provided "free loaded on truck". No dismantling and loading costs! TECHNICAL DETAILS X-axis travel: 3,280 mm Y-axis travel: 1,320 mm Z-axis travel: 170 mm CNC control: BiesseWorks Working beams: 6 pieces Suction cups: 18 pieces Tool magazines: 12 MACHINE DETAILS Total weight: 3,000 kg Electrics Input voltage: 400 V Type of input current: AC Required power: 25 kW Hsdpevvvcbsfx Addefb EQUIPMENT - Safety mats - BECKER vacuum pump

Condition: used, Year of construction: 2013, Working center with automatic robot for panel loading and unloading management Biesse XP600 Numerical Control with Biesse Works ADVANCE graphic interface software - machine version and version office - WRT technology (Widows real time) the machine control logic is processed directly on the PC and not on a dedicated special device Working field in X axis 6200 mm Working range in Y axis mm 1552 Working field in Z axis 180 mm Z axis travel mm 235 N ° 2 work fields in X axis Bar worktop \ console No. 10 EPS electronically adjustable bars for suction cup support N° 8 pneumatic bakelite bars for lifting the panel - loading / unloading aid N° 4 EPS electronically adjustable suction cups for each bar with vacuum seal for fixing the panel during the processing N° 1 vertical electrospindle, with automatic tool change, motor KW 12 - 12000 RPM - flange for aggregates - preparation for C-Axis Vector Automatic tool change system with 12 positions - positioned on the machine head Hfodpfjkvrxuex Addjb BH35L boring head with spindles arranged as follows: - N° 14 verticals in X axis - N° 10 vertical in Y axis - N° 6 horizontal in X axis - N° 4 horizontal in Y axis Independent blade for making grooves in the X axis - diam. 120 mm Front protection and safety system with carpets Perimeter protection grids Automatic lubrication system Machine control cooling and cleaning system with conditioner Vacuum pump mc / h 250 Kuka industrial robot with 6 articulated axes with point-to-point positioning. Independent control panel Panel alignment table Barcode reader on the robot arm Panel introduction system via: * 1 motorized roller conveyor for panel stack preloading * 1 translating motorized roller conveyor * 1 motorized panel stack unloading roller conveyor Technical features: * Type : KR210-2 * Number of axles : 6 * Admissible nominal load : Kg 210 * Machine weight : Kg 1267 * Sound level: 75dB * Installed power: 25.8 kW * Panel dimensions - Min\max length: mm 300\3000 * Panel dimensions - Min\max width: 180\1500 mm * Panel dimensions - Min\max thickness: 8\60 mm * Max panel weight: Kg 90

Condition: ready for operation (used), Technical characteristics X axis travel : 3290 mm Y axis travel : 1100 mm Z axis travel : 326 mm Part passage : 170 mm Electrospindle : 5-axis spindle, 11 kW HSK F63 chuck Revolver-type tool magazine, 16 tool holders Tool magazine at end of work surface, 10 tool holders BH26 2L drilling unit : Vertical and horizontal drilling unit + grooving unit 16 vertical drill bits, 32 mm centres (8 X-oriented and 8 Y-oriented) 8 horizontal drill bits, 32-mm pitch (4 X-oriented and 4 Y-oriented) 2 grooving blades, diameter 120 mm, for grooving in X and Y (useful cut 25 mm) Independent Z drilling unit to optimize machining times Work surface : NC-controlled worktable with motorized moving beams 6 ATS beams with automatic positioning (EPS) and suction cups 3 steerable suction cups with motorized movement per beam 1 Vacuum pumps 250 m3/h Controls : Hfodpfx Adjuaz H Isdob On Windows PC RM850 remote control with integrated LCD screen 2 pedals for cycle start Controlled by BiesseWorks software BiesseWorks Advanced software machine version: Programming and optimization of drilling, cutting, milling, toolpaths and tool changes Customized parametric macros Network and/or USB file imports 3D part and toolpath simulator Parametric programming of the workpiece Collision management Tooling set and parametric cones supplied Power and Motors Voltage: 400 V Pluging: Three-phased Power: 17 Kw Motor: 18 CV Overall dimensions Lenght: 5412-5912 mm Width: 5120 mm Height: 2910 mm

Condition: used, Year of construction: 2015, Numerical Control NC 1000 Software Biesse Works Working field in X axis 4300 mm Working field in Y axis 2205 mm FT nesting full plane worktable Automatic loading system with side lifting table Automatic labeling machine for barcode printing Automatic printing and application system of adhesive labels N ° 1 vertical electrospindle, with automatic tool change, HSK F63 Blade unit integrated in the drilling head on X axis - diam. 120 mm Blade unit integrated in the drilling head on Y axis - diam. 120 mm Automatic tool change system with 8 positions - positioned on the machine operating head Automatic tool change system with 21 positions - positioned on the rear of the machine with chain BH 20 boring head with independent spindles arranged as follows: - N ° 8 vertical in X axis - N ° 8 vertical in Y axis - N ° 4 horizontal in X axis - N ° 4 horizontal in Y axis Automatic unloading system with motorized belt Front protection and safety system with carpets and perimeter nets Automatic lubrication system Air conditioning system for the electrical panel Vacuum pumps Hfedpfowt Snyjx Addjb

Condition: ready for operation (used), Technical characteristics 3-axis spindle, 11 kW, 1000 to 24000 rpm 10 Y / 10X vertical drilling unit 6 X / 2 Y horizontal drilling unit XNG digital control 8-position on-board tool loader + pick-up loader on frame Machine to be restarted dimension plan de travail en Y1640 mm Dimension plan de travail en X3430 mm Caractéristiques usinageDrilling unitOnboard tool chargerNesting table Hfsdpfx Adot Rrdaedjb Power and Motors Overall dimensions

Condition: used, Year of construction: 2009, Biesse Works Control Working range on X axis mm 3500 Working range on Y axis mm 1585 Working stroke in Z axis mm 350 N ° 2 work fields Bar worktop No. 8 adjustable bars N° 4 pneumatic Bakelite bars for lifting the panel No. 3 adjustable suction cups for each bar with vacuum seal for fixing the panel during processing No. 1 4-axis vertical electrospindle (Vektor), with automatic tool change, HSK type cones 10-position rotary tool change system on the operating head 24-position chain tool change system - located on the rear of the chain machine Drilling head with vertical and horizontal spindles composed as follows: n. 12 vertical spindles in X n. 12 vertical spindles in Y n. 6 horizontal spindles in X n. 4 horizontal spindles in Y n. 1 independent blade for making X-grooves Front protection and safety system with carpets Perimeter protection grids Chip evacuation system with motorized belt Air conditioning system for cooling and cleaning of machine control Vacuum pump 250mc/h TECHNICAL DETAILS TO BE CHECKED Hfedpfxew D Dhao Addjb

Condition: ready for operation (used), Technical characteristics 8 suction cup beams + vices Electrospindle 10.5 CV ISO 30 8 on-board tool carrier charger 20 vertical spindles and 4 horizontal spindles drilling unit Machine to be restarted dimension plan de travail en Y1630 mm Dimension plan de travail en X3430 mm dimension plan de travail en Z185 mm Nombre de poutres8 Caractéristiques usinageEvacuation conveyorVacuum pump Capacité pompe à vide100 m3/h Power and Motors Overall dimensions Hjdotqkbbopfx Addjfb

Condition: used, XNC Numerical Control Working range on X axis mm 3400 Working range on Y axis mm 1300 Working stroke in Z axis mm 155 N ° 2 work fields Bar worktop No. 8 manually adjustable bars for suction cup support with display for viewing working heights No. 8 pneumatic bakelite bars for lifting the panel No. 3 manually adjustable suction cups for each bar with vacuum seal for fixing the panel during assembly processing No. 1 vertical electrospindle with C-axis Vector, with automatic tool change, Iso 30 type cones, flange for use aggregates Automatic tool change system with 3 positions for aggregates positioned on the side Automatic tool change system with 20 positions and chain Drilling head with mandrels arranged as follows: - No. 10 verticals on X axis - No. 12 verticals in Y axis - N° 6 horizontal on X axis - No. 2 horizontals on Y axis Front protection and safety system with carpets Perimeter protection grids Motorized carpet for chip evacuation Vacuum pump Hedev Edggjpfx Addefb

Condition: used, Numerical Control NC 1000 Software Biesse Works Working field in X axis 3685 mm Working field in Y axis 1290 mm Working stroke in Z axis 200 mm - piece passage 70 mm FT nesting full plane worktable Automatic loading system with side lifting table N ° 1 vertical electrospindle, with automatic tool change, Automatic tool change system with 18 positions - positioned on the rear of the machine Boring head with independent spindles arranged as follows: - N ° 7 vertical in X axis - N ° 7 vertical in Y axis - N ° 2 horizontal in X axis - N ° 2 horizontal in Y axis Automatic unloading system with motorized belt Front protection and safety system with carpets and perimeter nets Automatic lubrication system Air conditioning system for the electrical panel Vacuum pumps TECHNICAL DETAILS TO BE CHECKED UPON ARRIVAL OF THE MACHINE Hodpfx Adjwufv Todsfb

Condition: used, Year of construction: 2017, Numerical Control with B-Solid Software Working range in X axis 3600 mm Working range in Y axis 1800 mm N ° 2 work fields Nesting worktable Automatic loading system with side lifting table Label printing system with automatic application on the loading table Panel detachment system with suction cups N° 1 3-axis vertical electrospindle, 13.2 kW, with automatic tool change, ISO 30 cone type Automatic tool change system with 16 positions - positioned on the back of the machine Automatic tool change system with 8 positions - on the machine BH 10 drilling head with 10 spindles arranged as follows: - N° 15 verticals on the X axis - N° 17 verticals on the Y axis Automatic unloading system with motorized belt Worktop cleaning system Protection and safety system with perimeter grilles Security system with Bumper Automatic lubrication system Hfjdsqvt D Repfx Addsb Air conditioning system for cooling and cleaning the machine control 250 m3/h vacuum pumps